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真空腔室<\/span><\/strong> <\/p> <\/td>

L400×W400×H500<\/span>，前后開門結(jié)構，SUS304<\/span>不銹鋼材質(zhì),<\/span><\/span> <\/p> <\/td> <\/tr>

極限真空<\/span><\/strong> <\/p> <\/td>

優(yōu)于6.0×10^{-5<\/sup>Pa(<\/span>如需獲得更高的真空度可選擇進口真空泵組)<\/span><\/span> <\/p> <\/td> <\/tr>}

蒸發(fā)源<\/span><\/strong> <\/p> <\/td>

8<\/span>組蒸發(fā)源（舟式源或掛絲源，兼容有機材蒸發(fā)）                                     <\/span><\/span><\/span> <\/p> <\/td> <\/tr>

手套箱系統(tǒng)<\/span><\/strong> <\/p> <\/td>

手套箱箱體尺寸：大箱體L1800×W750×H900mm<\/span><\/span> <\/p>

箱體泄露率<0.05vol%/h<\/span>，標準環(huán)境箱體內(nèi)水、氧指標<1ppm<\/span><\/span> <\/p> <\/td> <\/tr>

報警及保護系統(tǒng)<\/span><\/strong> <\/p> <\/td>

對泵、電極等缺水，過流過壓，斷路等異常情況進行報警并執(zhí)行相應保護措施；<\/span>完善的邏輯程序互鎖保護系統(tǒng)<\/span> <\/p> <\/td> <\/tr> <\/tbody> <\/table>

  <\/p> <\/td>